TSMC's EUV Energy Saving Program to Cut 2030 Carbon Emissions by 101 Kilotons
Taiwan Semiconductor Manufacturing Company (TSMC), the world's leading semiconductor foundry, has been actively working to reduce its energy consumption and carbon footprint. The company has launched the EUV Dynamic Energy Saving Program and is exploring further measures to cut power usage.
TSMC's EUV Dynamic Energy Saving Program has shown promising results. By mid-2024, the company successfully reduced the power consumption of its Extreme Ultraviolet (EUV) lithography systems by 24%. This program is projected to yield 190 million kilowatt-hours in electricity savings by 2030 and cut carbon emissions by 101 kilotons in the same period.
The program began rolling out at Fabs 15B, 18A, and 18B in September 2025 and is expected to be fully deployed by the end of 2025. TSMC aims to reduce power consumption and meet its sustainability goals through this initiative.
TSMC is also exploring the possibility of applying dynamic energy control mechanisms to Deep Ultraviolet (DUV) scanners and other machinery. Currently, only 46.1% of TSMC's power consumption comes from its actual fab tools, with the remaining 53.9% consumed by supporting systems. Despite this, TSMC consumes around 9% of Taiwan's total power consumption, underscoring the significance of its energy-saving efforts.
TSMC's enhanced fab-level automation has already reduced the peak power draw of EUV tools by 44% without compromising output, quality, or yields. However, specific details on planned measures to reduce energy consumption of DUV scanners remain unclear.
TSMC's EUV Dynamic Energy Saving Program has demonstrated significant potential in reducing power consumption and carbon emissions. With full deployment expected by the end of 2025, the program is set to make a substantial impact on the company's energy usage. Meanwhile, TSMC continues to explore further energy-saving measures, including dynamic energy control mechanisms for DUV scanners and other machinery, to meet its sustainability goals.
